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OAI Model 800E 型掩模對準(zhǔn)系統(tǒng)

。各種光譜范圍選項(xiàng):Hg燈:G(436nm),，H(405nm),， I(365nm)和310nm線,，Hg-Xe燈:260nm和220nm

,。基片尺寸范圍從4“8”直徑

,。燈功率范圍從200到2000W或LED

,。電腦操作和配方存儲

。易于使用的GUI和多功能操縱桿

,。手動對齊在頂部和底部雙2 mp GigE攝像機(jī)和機(jī)動的X-Y-Z-Theta舞臺與操縱桿/菜譜操作

。升級到自動對齊w / Cognex軟件升級

。楔自動補(bǔ)償和機(jī)動z軸帶有編碼器和3點(diǎn)水準(zhǔn)升級選項(xiàng)

,。紅外光學(xué)背面對齊選擇升級

,。接近(20um): 3.0um，軟觸點(diǎn):2.0um,，硬觸點(diǎn):1um,，真空觸點(diǎn):≤0.5um

。提供正面和背面接觸和對齊0.5 - 1的準(zhǔn)確性

,。提供半自動化/研發(fā)和低容量生產(chǎn)模式

,。適用于MEMS、半導(dǎo)體,、Microfludic納米印記,，PSS襯底和CLiPP流程

Model 800E Mask Aligner System

。 Various Spectra Range Options: Hg Lamp: G (436nm),， H (405nm),， I(365nm) and 310nm lines， Hg-Xe Lamp: 260nm and 220nm

,。 Substrate sizes range from 4” to 8” diameter or square

,。 Lamp Power range from 200 to 2，000W or LED

,。 PC Operation and Recipe Storage

,。 Easy to use GUI and Multifunction Joystick

。 Manual Alignment with Top and Bottom Dual 2MP GigE Cameras and Motorized X-Y-Z-Theta Stage with Joystick / Recipe Operation

,。 Upgrade to Auto Alignment w/ Cognex Software Upgrade

,。 Automated wedge compensation and motorized z-axis with encoder and option for 3 Point Leveling Upgrade

。 IR Optics Backside Alignment Option upgrade

,。 Proximity (20um): <3.0um,， Soft Contact: <2.0um， Hard contact: 1um and vacuum contact : ≤ 0.5um

,。 Provides Front and backside exposure and alignment accuracy of 0.5-1um

,。 Available in semi automated / R&D and low volume production modes

。 Applicable for MEMS,， Semiconductor,， Microfludic， NanoImprinting,， PSS Substrate and CLiPP Processes