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用于SEM的主動式壓電陶瓷振動消除地板式平臺
STACIS iX SEM-Base主動式壓電陶瓷地板式隔振平臺是專為掃描電子顯微鏡所設(shè)計的。掃描電子顯微鏡是振動*敏感的儀器,，而且這些精密儀器都有內(nèi)置的隔振系統(tǒng),，SEM-Base可以兼容SEM內(nèi)部預裝的振動隔離系統(tǒng)。
SEM-Base是可以替代65系列STACIS 2100地板式平臺的簡潔且性價比高的選擇,。它集成了STACIS技術(shù)但是外形更小,，且安裝更加簡單。
SEM-Base可以從低于1Hz開始隔離振動,。SEM-Base只有6.5in.高,，底座尺寸是35.5in.x44.5in.，自重約為650磅,，可以支撐900磅（409kg）到2500磅（1134kg）的負載,。
特性：
1、包含STACIS技術(shù)
2,、主動的內(nèi)部振動消除裝置
3,、適合大部分商業(yè)SEMs。（35.5*44.5*6.5inch）
4,、負載容量：900-2500lb
5,、振動消除起始頻率小于1Hz
6、六自由度
8,、安裝容易
9,、兼容所有內(nèi)置振動隔離系統(tǒng)
10、非氣浮系統(tǒng)
11,、簡單,，魯棒性好，性價比高
12,、可安裝腳輪,，輕松攜帶移動，不需要搬運
Active degrees of freedom | 6 |
Active bandwidth | 0.6 Hz - 100 Hz |
Passive natural frequency | 12 Hz nominal |
Effective active resonant frequency | 0.5 Hz |
Isolation at 1 Hz | 40% - 70% |
Isolation at 2 Hz | 90% |
Isolation at ≥3 Hz | 90-98% |
Internal noise | <0.1 nm RMS |
Operating load range | Standard capacity: 900 - 2,，500 lbs (408 - 1134 kg) High capacity: 2,，500 - 3，200 lbs (1134 - 1452 kg) |
Static lift capacity | 12,，000 lbs (5454 kg) |
Magnetic field emitted at maximum 4 in.(102 mm) from the platform | <0.02 μG broadband RMS |
Environmental and safety | CE and RoHS compliant |
Active isolation elements | high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC |
Passive isolation element | single stiff elastomer (no compressed air supply required) |
Vibration sensor elements | downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion |
Active feedback control loop | Floor vibration is measured， processed and attenuated below the spring supporting the isolated surface |
Dimensions (WxD) | 35.25 x 44.25 in. 895 x 1124 mm |
Height | 6.3 in. (160 mm) nominal,， doesn't change when SEM-Base is switched off |
Operating temperature | 50° - 90° F 10° - 32° C |
Storage temperature | -40° - 130° F -40° - 55° C |
Humidity (operating) | 30 - 60% |
System power requirements | 100,， 120,， 230,， 240 VAC 50/60 Hz AC; <600 w CE compliant |
Floor displacement | <800 μin. (20 μm) below 10 Hz |
Processor | 150/75 MHz dual core |
Sampling rate | 10 kHz |
Analog outputs | 16 channels |
Analog inputs | 16 channels |
Status light | single LED |
Front panel ports | 1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC |
User interface | Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI |
1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s， 12.5 μm/s RMS)
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